
Ultra High Purity Oxygen Generator
Shenger Gas's ultra high purity oxygen generator is based on a combination of cryogenic air separation and high-efficiency pressure swing adsorption (PSA) technologies. By precisely separating the components of air, the system delivers a stable oxygen purity of up to 99.999% (5N). It is equipped with a fully automated PLC control and intelligent monitoring module, enabling continuous operation and remote diagnostics while maintaining high purity and low energy consumption even under complex operating conditions.
Key Advantages
1. Exceptional Purity and Stable Supply
- The core distillation column and purification system are specially designed to maintain oxygen purity consistently above 99.999% (5.0N), effectively controlling total hydrocarbons (THC), moisture (H₂O), and other impurities at the ppb level.
- The fully automated control system ensures 24/7 continuous oxygen supply, eliminating production risks caused by purity fluctuations.
2. Superior Energy Efficiency and Cost Performance
- By integrating high-efficiency molecular sieve pretreatment and turbo-expander technology, the system significantly reduces overall power consumption.
- Compared with traditional liquid oxygen tanks or cylinder gas delivery, on-site gas generation can save up to 30% of total oxygen costs, maximizing investment returns.
3. Safety and Reliability as the Foundation
- The system incorporates multiple safety interlock protections, addressing potential oxygen-enriched environment risks inherent in cryogenic processes to ensure operator and equipment safety.
- All key components are sourced from internationally recognized brands, ensuring long-term operational stability and minimal failure rates.
4. Intelligent Control and Easy Maintenance
- Equipped with an advanced PLC + touchscreen HMI, the system allows one-touch startup/shutdown, remote monitoring, and fault diagnostics.
- Its modular design simplifies daily maintenance and spare-part replacement, minimizing downtime and improving system availability.
Main Technical Parameters
|
Item |
Technical Specification |
|
Oxygen Purity |
≥ 99.999% (optional 99.9%–99.9995%) |
|
Oxygen Flow Rate |
5 Nm³/h – 10,000 Nm³/h (customizable) |
|
Working Pressure |
0.2 – 1.0 MPa (adjustable) |
|
Start-up Time |
≤ 30 minutes (fully automatic start-up) |
|
Control System |
Siemens / Mitsubishi PLC + touchscreen interface |
|
Power Supply |
AC 380V / 50Hz (optional 220V or 60Hz) |
|
Cooling Method |
Air-cooled or water-cooled (depending on project design) |
The system is equipped with a complete auxiliary package, including an air compressor, pre-treatment and drying system, adsorption tower, buffer tank, valve assembly, and purification unit.
All components have been verified for gas compatibility and cleanliness, ensuring long-term stable and reliable operation.
Typical Applications
- Semiconductor Manufacturing: Oxygen supply for chip oxidation, CVD, and PVD processes.
- New Energy Batteries: Calcination, drying, and sintering of lithium battery cathode materials.
- Medical and Pharmaceutical: Oxygen supply systems for hospitals, laboratories, and biotech facilities.
- Metallurgy and Glass: Oxygen for high-temperature combustion and furnace enrichment.
- Chemical and Environmental Industries: Used in oxidation reactions, ozone generation, and exhaust gas treatment.
With extensive expertise in industrial gas systems, Shenger Gas provides tailor-made oxygen generation solutions for global clients-covering every stage from process design and equipment manufacturing to on-site installation and commissioning-meeting the most demanding purity and reliability standards across diverse industries.
Certifications and Standards
Shenger Gas strictly adheres to international manufacturing and quality standards. All ultra high purity oxygen generator products are certified and compliant with:
- ISO 9001 / ISO 14001 – Quality and Environmental Management Systems
- ASME U Stamp – Authorization for pressure vessel fabrication
- CE / PED 2014/68/EU – European Safety Directive compliance
- Key components conform to IEC, UL, and RoHS standards for electrical safety and environmental protection
Each unit undergoes full-load performance testing and oxygen purity verification prior to shipment, ensuring long-term operational safety and reliability.
Choosing Shenger Gas's ultra high purity oxygen generator means more than selecting a high-performance machine-it means partnering with a reliable, efficient, and value-driven on-site oxygen generation solution provider. With advanced cryogenic air separation technology, rigorous international certifications, and comprehensive lifecycle services, Shenger Gas safeguards your critical production processes and stands as your trusted global partner in industrial gas solutions.






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